Partial stocker
Partial stocker
~ Nitrogen Replacement Type Stocker for Suppressing Natural Oxide Film on Silicon Wafer Surfaces ~ ◆ Product Features ◆ - Reliable nitrogen replacement with a small amount of nitrogen - Energy-saving design - Faster nitrogen replacement speed compared to conventional products - Uniform distribution of oxygen concentration (variation within ±10% in each chamber) - Prevention of organic gas contamination through a non-seal method - Unique partial storage in each chamber to achieve isolation from the atmosphere
- 企業：ダン・タクマ
- 価格：Other
